Wide Scan Angle and Large Aperture (180 Degrees/2.5 MM) Resonant Piezoelectric MEMS Mirror

This study designs and implements a resonant piezoelectric MEMS scanning mirror achieving an optical scan angle of 180 degrees. The design has three merits: (1) Wing-shape actuator (Fig.1a): to serve as the torque generator to drive the torsional spring and mirror (diameter: 2.5 mm); (2) Torsional spring (Fig.1b): to withstand the maximum stress during scanning while localizing energy at the torsional spring and mirror; and (3) Support-spring anchor (Fig. 1b): to reduce stress during scanning using suspending support-spring with partially removed KNN. Measurements demonstrate that the scanner achieves a 180-degree optical scan angle at resonant frequency of 2.8 kHz (without requiring a vacuum environment) under a driving voltage of 25 V.