A Novel Multimode Chainring-Shaped Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array for Bandwidth Extension

In this study, we introduce a novel Piezoelectric Micromachined Ultrasonic Transducer (PMUT) structure that leverages multimode vibration to significantly expand bandwidth at high frequencies. The research presents a unique “chainring”-shaped PMUT cell configuration, and an array design engineered to minimize crosstalk. Verified by simulation, the proposed design demonstrated a fractional bandwidth exceeding 100%, centered at 6 MHz. The design was fabricated and validated with experiments.