Low Thermal Conductivity Uncooled Infrared Bridge Microbolometer Based on Beams of Constant Strength

This paper proposes an uncooled infrared bridge microbolometer based on beams of constant strength (BCS) for the first time. A systematic method is introduced to calculate stress distribution in the beams, leading to an analytical solution for optimizing beam width via force-thermal coupling. This optimization preserves mechanical support while achieving a 2.58-fold reduction in thermal conductivity. Operating under atmospheric conditions, the BCS microbolometer achieves a 1.63- fold increase in read-out voltage compared to the conventional beam of constant width (BCW) design. This advancement provides a quantitative basis for microbolometer applications in varied acceleration environments.