Reducing Drifts of MEMS Piezoresistive Gyroscopes in Uncontrolled Environment

This paper presents a novel compensation strategy for MEMS piezoresistive gyroscopes that combines angular rate sensing with real-time correction of temperature and stress-induced substrate deformations. The design leverages (250 nm)2 piezoresistive strain gauges for drive and sense modes detection, enabling compensation of zero rate output (ZRO) drifts by separating low-frequency temperature and stress components from the rate component modulated at ~25 kHz. The resistive sensing approach provides immunity to parasitics, supporting multiple electronic circuits without degrading the 0.015 °IVh angle random walk (ARW). Experimental results show a 15x reduction in rate random walk (RRW) using linear compensation of ZRO drifts based on measured low-frequency stresses.