Fast start-up procedure for two-dimensional MEMS micromirror

Oscillating Microelectromechanical System (MEMS) mirrors can be used for several applications, such as Light Detection and Ranging (LiDAR), Head-Up Displays (HUDs), Augmented Reality (AR) goggles or interior projections, due to their small size, high precision and robustness. One main problem is that the state-of-the-art start-up procedure takes a significant amount of time, which makes their usage impractical for certain use cases. Therefore it is important to achieve a shorter start-up time for two-dimensional MEMS mirrors.The aim of this work is to speed-up the start-up of a resonant, two-dimensional, electrostatic MEMS mirror in order to make it applicable for numerous applications, where a short start-up time is required. Therefore concept is designed, simulated and prototyped in FPGA and implemented in the next generation of the MEMS Driver ASIC. Measurements are executed with the proposed concept to verify that it works as intended for the real mirror signals. With the presented concept a crucial part of the overall start-up procedure is sped up and made more reliable. The simulations and measurements show that the established concept fulfills its purpose to shorten and stabilize the start-up of the mirror.