Mechanical Design Consideration of Serpentine Spring for Monolithic Actuator Platform

Recent advancements in integrating MEMS with silicon photonic circuits have introduced innovative ways to tune light propagation. Comb-type actuators, powered by electrostatic forces, offer an efficient solution for creating a mechanical platform for waveguide beam steering. This study numerically analyzes the stiffness of serpentine springs in an actuator platform for monolithic coupled systems. By applying deflection at the waveguide's center, which incorporates a concave grating mirror, light can be precisely tuned to receive different wavelengths.