Response Time Analysis of Thin Film Based Piezoresistive Pressure Sensor

This paper presents a timing analysis of a thin film based gauge piezoresistive pressure sensor, which is designed in COMSOL Multiphysics. In such sensor designs, sensitivity and response time are critical constraints, both of which are influenced by the geometric parameters of the sensor. Sensitivity analysis can be performed using a stationary solver, while response time can be evaluated through time dependent simulations. However, discrepancies may arise between these analyses. These mismatches can be observed by the displacement of the center of the membrane in the time domain. While the sensitivity constraint may meet the design requirements, it must also be achieved within the specified response time. The stationary study provides steady state results; however, reaching a steady state condition within the required response time may not always be feasible. Therefore, to ensure the manufacturability of the sensor, stationary and dynamic analyses must be performed. The findings of this study offer a potential solution to mitigate these mismatches before the manufacturing process.