Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes

Frequency splitting occurs between the degenerate modes of MEMS ring gyroscopes due to manufacturing errors, which severely restricts their performance. This letter presents a frequency split tuning method based on Joule heating in a fused silica inductive vibrating ring gyroscope. A specially designed wire layout generates a temperature gradient on the resonant structure when current flows through, causing different frequency shifts in the two degenerate modes, thus achieving frequency split tuning. This method successfully enabled mode matching for a gyroscope with an initial frequency split of 1.47 Hz, demonstrating a frequency split tuning capability of 58 Hz/W.[2025-0075]