One-Step Fabrication of Mirco-Mirror Based 3D Polymer Optical Link for Co-Packaged Optics Using Imprint Technology

Optical link among components on a board is key technology to achieve co-packaged optics. In this study, we demonstrated simultaneous fabrication of 3D optical link composed of micro-mirrors and polymer waveguides by imprint process. Using a high-precision mold patterned by two-photonpolymerization 3D printing without replication, 45-degree-angled mirrors with 40 waveguides were stably fabricated in single imprint process, achieving a standard deviation of 0.467 degrees.