A 37.8Mb/mm2 Sram in Intel 18A Technology Featuring a Resistive Supply-Line Write Scheme and Write-Assist with Parallel Boost Injection

A high-density, SRAM-based Register File (RF) has been demonstrated in Intel 18A Technology [1] featuring RibbonFET GAA transistors and a Back Side Power Delivery Network (BSDPN). The RF is optimized for high density and array efficiency and achieves a density of $37.8 \text{Mb} / \text{mm}^{2}$, the highest density reported to date for an RF. It is implemented with a conventional Bitline (BL), two-bank memory architecture and it can be used as the SRAM workhorse for most SoC applications with maximum bit-count of 262 Kb.