High-power, low-loss, fabrication tolerant multi-tip SiN edge coupler in 300mm monolithic SiPh foundry technology

We report the successful demonstration of monolithically integrated O-band Vgroovebased multi-tip SiN edge couplers, achieving $0.5 / 0.9 \mathrm{~dB}$ insertion losses for two polarizations at 1310 $\mathrm{nm},\gt280 \mathrm{~mW}$ power handling and $\lt-40 \mathrm{~dB}$ optical-return-loss, surpassing IEEE 802.3 performance standards.