100 GHz Ultra-thin Germanium Photodetector with 1.05 A/W Responsivity at 1550 nm

We demonstrate lateral-PIN germanium photodetectors with high bandwidth of up to $100 \mathrm{GHz},\gt0.8 \mathrm{~A} / \mathrm{W}$ responsivity in the C-band and $(\lt)20 \mathrm{nA}$ dark current by utilizing ultra-thin germanium technology on CMOS silicon-photonic platform.