Wafer Scale TFLN Platform Exhibiting 0.1 dB/cm Single Mode Propagation Loss

Wafer scale thin film lithium niobate platform was demonstrated based on deep ultraviolet photolithography. The average single mode propagation loss is 0.23 dB/cm at 1550 nm with standard deviation of 0.07 dB/cm. A 0.1 dB/cm level single mode propagation loss was measured at 1576 nm.