Advancements in LPCVD SiN Waveguides: Achieving 3 dB/m Propagation Loss on 200 mm Wafers

We demonstrate low-loss LPCVD silicon nitride waveguides on 200 mm wafers with propagation losses reaching as low as $3 \mathrm{~dB} / \mathrm{m}$ at 1550 nm; with combined improvements in fabrication process; enhancing the current silicon nitride platform of imec.