High-Q and Low Mode Volume Photonic Crystal Nanobeam Cavities on a Commercial 300 mm Silicon Photonic Platform

We fabricate photonic crystal nanobeam cavities quality factors in excess of 150,000 on AIM Photonics’s 300 mm silicon photonic platform. We use the cavities to demonstrate enhancement of $\mathrm{Er}^{3+}$ ion emission with Purcell factors >100. © 2024 The Author(s)