Back-End-Of-Line Integration of Organic Thin-Film Transistor Active-Matrix on III-V Micro-LED Array for Video-Rate High-Resolution Displays

This work develops a back-end-of-line (BEOL) integration process for directly fabricating organic thin-film transistor (OTFT) active-matrix (AM) on top of III-V microsize light-emitting diode (micro-LED) wafer. Through buffer layer introduction and contact interface engineering, highperformance short-channel OTFTs (mA-level driving current and $5.9 \times 10^{11}$ ON/OFF ratio) are integrated on top of the micro-LED surface. A 508 PPI AM micro-LED display with a brightness of 27,200 nits is finally demonstrated for video displaying.