A Wide-Range, High Stability Navigation-Grade MEMS Frequency-Modulated Accelerometer

This paper presents the results of a micro-electro-mechanical systems (MEMS) frequency-modulated accelerometer (FMA) with a ±50 g dynamic range demonstrating a bias and scale factor stability of 12.65 μg and 1.9 ppm respectively over an operational temperature range of -40°C to 60 °C. The device utilizes advanced MEMS fabrication techniques, low-stress packaging, optimized MEMS structure to achieve exceptional performance. At room temperature, its Allan deviation for measurements reveals a bias instability of 89 ng, while the maximum scale factor nonlinearity within ±50 g is less than 50 ppm. These confirm that the device meets the navigation-grade performance, offering both high stability and wide range.