The Application of an Almost Forgotten Theory to Explain the Leakage Current Mechanism in State-Of-The-Art High-K Dram Mim Capacitors

In 1969, a theory was proposed that the leakage current-voltage (I-V) characteristics sometimes appear to follow the Poole-Frenkel theory for one polarity and the Schottky emission theory for the other polarity. Subsequently, this theory was almost forgotten. In this paper, the author will apply this almost forgotten theory to explain the leakage current mechanism in DRAM MIM capacitors.