Sustainable Piranha Acid Management and Reuse via Redox-Active Catalytic Media

In semiconductor manufacturing, piranha acid, a mixture of sulfuric acid and hydrogen peroxide, is commonly used to clean silicon wafers but poses significant disposal challenges due to its hazardous nature. Current disposal methods, such as off-site transport or hydrochloric acid addition, are expensive, risky, and generate additional hazardous byproducts. This study introduces a novel redox-active catalytic media that efficiently decomposes hydrogen peroxide in piranha acid on-site, converting it to water and oxygen. This approach reduces environmental risks, simplifies the disposal process, and aligns with industry goals for safety and sustainability.