Low loss PVD SiN waveguides with 300mm wafer size

We present a photonic platform based on Physical Vapor Deposition (PVD) SiN at 300mm wafer size. C-Band (1550nm) propagation losses obtained for low deposition temperature of SiN (200°C) were down to 0.30dB/cm and 0.13dB/cm after annealing at 800°C. Low propagation losses were obtained as well for O-band (1310nm) and around 900nm wavelength. Those results, highlight the interest of PVD SiN for industrial scale photonic applications when a low temperature budget integration is needed with no compromise on performances.