Aging Characterization at Cryogenic Temperature with Synthesizable Odometers in 12NM and 28NM

This work presents the results of monitoring aging behavior at cryogenic temperature using a synthesizable, calibration-free on-chip reliability sensor. The odometer is based on the beat frequency technique, and it measures aging degradation at cryogenic temperature within microseconds, effectively mitigating inaccuracies caused by aging recovery. By detecting frequency shifts as small as 0.01%, the sensor demonstrates exceptional sensitivity, making it particularly wellsuited for analyzing cryogenic test results. Experiments on 28nm planar and 12nm bulk FinFET technologies show very low degradation at cryogenic temperature after only two days of stress testing. These findings emphasize the efficiency of on-chip sensors in facilitating precise reliability analysis under extreme environmental conditions, underscoring their potential for future applications in high-performance and space-grade systems.