Integration of Monte Carlo Transport Simulations Into a TCAD Workflow for Electron Detector Developments

A new methodology is presented and allows for the integration of Monte Carlo electron distributions into the Sentaurus workflow for the development of electron detectors applied to transmission microscopes. The proposed method consists of converting electron positions generated by the Monte Carlo software in an optical generation file, which can be used in Sentaurus device simulations. Results are validated by means of comparisons between electron distribution provided by the two simulators and by comparison with an experiment. Limitations are also discussed.