A 2-D Tin Disulfide Nanosheet Gas Sensor for Hydrogen Sulfide

This study uses tin disulfide (SnS2) powder with a micro-electromechanical system (MEMS) structure to fabricate a microsheet (micro-Ss)/MEMS gas sensor. The SnS2 powder assumes a 2-D nanosheets (nano-Ss) structure after ultrasonic wave grinding to produce a 2-D SnS2-nano-Ss/MEMS gas sensor. The experimental results show that the SnS2-nano-Ss/MEMS gas sensor has a larger sensor response and lower resistance than micro-Ss/MEMS gas sensors so it is more easily integrated into circuit modules. If the SnS2-nano-Ss/MEMS hydrogen sulfide (H2S) gas sensor operates at 180 °C, it continues to detect H2S gas so the sensor is stable and reproducible. It is not sensitive to SO2, NO, H2, CO, CO2, or CH4 gases, so the SnS2-nano-Ss/MEMS gas sensor features good selectivity for H2S gas.