Development of MEMS Thermal Emitters Applicable in NDIR Gas Sensors: A Review

Thermal emitters applied in nondispersive infrared (NDIR) gas sensors can provide high-quality infrared emission, ensuring accurate gas detection. This review summarizes the development of thermal emitters based on the micro-electro-mechanical systems (MEMSs) technology, highlighting the optimization methods from three perspectives: structural design, microheater design, and radiation layer design. These strategies aim to achieve low power consumption, fast response, large modulation depth, and high homogeneity of thermal emitters. The review also discusses radiation materials with broadband or narrowband high emissivity, outlining their respective advantages and disadvantages. The performance of different MEMS thermal emitters is analyzed to identify optimal approaches for structural and material designs.