A Synchronous 13.1 GHz Backside Resonant Clocking Mesh Implemented on a Graphics Core in an 18A Class Technology

This letter presents a global resonant clocking mesh architecture utilizing backside metal layers in an 18A class technology. Rotary traveling wave oscillators are implemented to provide synchronous low-skew, low-jitter, and 50% duty cycle clocks across a graphics core. To provide dynamic frequency and voltage scaling capabilities across a wide range of operating conditions, a high-speed fractional divider is designed. The proposed architecture is implemented on a 1.6 mm $\times $ 1.6 mm graphics core achieving FoMJ of 246 dB FoMT 190.3dBc/Hz.