Optimization of Electrodes for a New Cut Quartz Tuning Fork Temperature Sensor

Quartz tuning fork temperature sensor with frequency as the output signal is a digital temperature sensor with high quality factor, low volume, low power consumption and other advantages, which plays an crucial role in the field of high-precision temperature measurement. To improve the performance of quartz tuning fork resonator, this paper proposes a quartz tuning fork temperature sensor with cut ZYlw(−10°,-41°) and optimizes its surface electrodes in order to reduce the parasitic effects generated at the tuning fork base. Simulation results show that for a new cut quartz temperature sensor we propose, the optimized electrodes exhibit good resonance characteristics with improved sensitivity and quality factor Q compared to the before optimization, especially the Q value is improved significantly by 12%.