High-Resolution Hair Texture Sensor with Monolithically Integrated Guiding Structure For Realization of Precise Evaluation and Simple Operation

In this study, we have realized a completely new tactile sensor that enables easy and stable evaluation of the tactile sensation of hair. By integrating guiding structures that leads the hair to the tip of micro contactors using MEMS process monolithically, the relative accuracy of alignment between measuring hair and the contactor tip has been maximized, enabling easy and accurate measurement of the micro texture on the hair surface simply. In addition, by taking advantage of the integration capability of MEMS, we have realized parallel measurement at different contact force conditions on the monolithic sensor chip for the first time.