A Pioneering Layer-By-Layer Fabrication Process for High-Density and High-Resolution Double-Sided Flexible Neural Electrodes

This study introduces a pioneering layer-by-layer fabrication process for double-sided flexible electrodes, eliminating the need for etching substrates or flip bonding. We have developed a high-density double-sided flexible electrode with 64 channels, achieving a thickness of 3.8 μm through a refined five-step lithography process. The incorporation of platinum black via electroplating not only reduces electrode impedance and enhances charge transfer but also verifies the method’s efficacy through in vivo experiments. This advancement allows for the collection of single-neuron signals with unprecedented spatial and temporal resolution.