A Tip-Tilt-Piston Piezoelectric Micromirror with a Double-S Shaped Unimorph Sputtered PZT Structure

The design, fabrication and characterization of a tip-tilt-piston (TTP) piezoelectric micromirror with a 1 mm² optical aperture is presented. The TTP piezoelectric micromirror consists of four symmetrically distributed double-S shaped unimorph piezoelectric actuators made of sputtered PZT films. Measurements show that the frequencies for the tip, tilt and piston modes are 6.21 kHz, 6.12 kHz and 3.51 kHz, respectively. A piston displacement of 5 μm is also reached under 50 Vdc, and an optical scan angle up to 16° is obtained at resonance with a driving voltage amplitude of 30 V.