Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism

This paper reports a biaxial force plate designed to measure ground reaction forces in small insects. The device utilizes a glass spring structure to detect both vertical and shear forces, with two laser displacement meters for force capture. A V-shaped groove formed by fiber laser-induced backside wet etching through a triangular prism, allows precise biaxial force measurements. The proposed force plate structure can be fabricated entirely using laser beam processing. The fabricated force plate realized a force resolution of 0.37 μN, providing the significantly high sensitivity for fruit fly measurement.