Significantly Enhanced Bandwidth of a Dual-Axis Piezoelectric Quasi-Static Mems Mirror for Miniaturized Laser Tracking

A large working bandwidth is the key to attaining real-time tracking and positioning of the target of a laser tracking system. This paper introduces a dual-axis piezoelectric quasi-static MEMS mirror, proposed for the first time in laser tracking. The bandwidth of the MEMS mirror is enhanced through structural optimization and control algorithms. The lightweight design results in a high resonant frequency of 1011.25 Hz. Optimization of the feedforward algorithm reduces the settle time from 2 s to 0.5 ms, significantly increasing the vector scan frame rate from 0.2 fps to 5.6 fps, thereby enhancing bandwidth to 2000 Hz. While the closed-loop control combined with filtering and PID algorithm can improve system reliability. Therefore, the dual-axis quasi-static piezoelectric MEMS mirror ultimately achieves to fast and stable for laser tracking.