Ghost Touch Free Wireless Nanogap Capacitive Pressure Sensor

This paper reports capacitive pressure sensor that is immune to external interference without requiring Electro-Magnetic Interference (EMI) shielding. To achieve stability against external interference, we employed a nanogap structure with an electrode gap reduced to an unprecedented 900 nm, which strongly concentrates the electric field between the electrodes. As a result, we effectively resolved the long-standing issue of external interference in capacitive pressure sensors solely through structural design, without the need for shielding. Furthermore, we maximized the sensor's pressure sensing performance by employing a nanostructure that can concentrate the applied stress. The fabricated nanogap capacitive pressure sensor was integrated with a customized circuit to implement a wireless pressure sensing system capable of real-time detection. This system reliably senses only the applied pressure, even in wet conditions.