Optical Cantilever Using Diffraction Grating and Sampling Moiré Method

This paper reports an optical cantilever that can measure displacement with high resolution by using an interference pattern and the sampling moiré method. The proposed cantilever has a diffraction grating on its surface, and when light is incident on the surface, the interference pattern of diffracted light is reflected. As the cantilever is displaced downward, the pattern also moves. The shift of the pattern is analyzed by the sampling moiré method. The cantilever displacement was magnified by a factor of approximately 17 using the optical lever method. The experimental results confirmed that the proposed method functions as a high-performance optical cantilever.