Monolithic Anemometer/Thermometer/Pressure Sensing Chip for Air Static/Dynamic Pressure Detection

This study presents a monolithic integration of anemometer/thermometer/pressure sensor to realize an environmental sensing hub for dynamic and static pressure detection. The design based on TSMC 0.35μm 2P4M CMOS platform and in-house post-CMOS processes. Features of the proposed design are: (1) Integrating an anemometer, thermometer and pressure sensor on a single chip for system-on-chip (SoC). Measurements indicate sensitivities of anemometer, thermometer and pressure sensor are respectively 160mV/(m/s), 1.1mV/ °C and 0.263fF/kPa. Thus, the dynamic pressure can also be extracted. (2) By integrating sensors, issues arising from cross-sensitivity can be promptly corrected, thereby enhancing the accuracy of the measurements.