An Electro-Dewetting Based Microfluidic Pixel Device

Electro-dewetting is an electrical actuation mechanism for liquid manipulation [1], [2]. This paper introduces the first microfluidic pixel device driven by electro-dewetting. Fabricated on a silicon-on-insulator (SOI) wafer, a proof-of-concept pixel is developed to confirm state switching between covering and exposing a substrate with a liquid film. Using reflective display as an example application, the device is characterized to identify the optimal range of actuation parameters. A stress test demonstrates that the electro-dewetting based microfluidic pixel has superior robustness than electrowetting-on-dielectric (EWOD) based counterpart, showing a promise for reliable reflective displays.