Scan-Angle Enhancement of Quasi-Static Piezoelectric Mems Mirror by Multiple Ring-Shaped Design and Cross-Electrode Arrangement

This study presents a novel quasi-static MEMS scanner featuring multiple ring-shaped actuators, designed to achieve angle enhancement through multiple scan angle accumulation. The proposed design has three merits: (1) multiple ring-shaped actuators (torque-generator): accumulating the scan-angle from outer/middle/inner ring-shaped actuators, (2) driving electrodes arrangement: enhancing angle accumulation to improve total scan-angle, (3) large reflective mirror size (3 mm×2 mm): enhancing laser beam scanning (LBS) image projection quality. Thus, large scan angle at quasi-static actuation is achieved. Measurements demonstrate the scanner has an optical scan angle of 18-degree (mechanical scan angle of ±4.5-degree) at the quasi-static actuation of 60/120 Hz with a unipolar driving voltage of 80 V. Compared with existing scanners, performances of presented design are competitive in figure-of-merit (FOM, optical-scanangle × mirror-size (θ×D)).