Inkjet-Printed Mn-Co-Ni-O Ceramic Microbeads Towards High-Sensitivity and High-Stability Temperature Sensing at Room Temperature

This paper presents a ceramic bead temperature sensor featuring a negative temperature coefficient. This sensor comprises Fe-doped Mn-Co-Ni-O (MCNO) ceramic beads, enabling temperature sensing close to room temperature (296.15K). MCNO ultra-small microspheres were prepared via the inkjet printing method. The temperature sensor was fabricated using Micro Electro Mechanical Systems (MEMS) technology. Compared to existing technologies, our device exhibits a temperature coefficient of resistance (TCR) of 3.9 %K^-1 at 296.15 K. Furthermore, our sensor stability within ±4 mK at 296.15 K, offering an economical and effective approach for engineering miniaturized temperature sensors with ultra-high sensitivity and stability.