Selective Formation of Laser-Induced Graphene (LIG) Adjacent to 3D Metal Electrode for Miniaturized LIG-Sensor Application

We propose an innovative LIG-metal interconnection technology that enables high electrical performance, mechanical durability, and miniaturization, suitable for advanced electronic devices. This approach utilizes 3D metal structures, selective laser-induced reactions, and the swelling properties of LIG to form nano-structured contact points, achieving a contact resistance of 485.34 Ω and scalability down to 80 μm. The method demonstrates stable performance across various frequencies and bending conditions. Applied in an LIG-based biosensor, this interconnection can detect uric acid (UA) within physiological concentrations (50-500 μM) without additional materials or interface areas, offering promising potential for scalable, high-performance microelectronic devices and arrays.