A 4.15 GHz Super High Frequency Quartz Resonator Based on Electron-Beam Lithography

Quartz resonators have been widely used in fields such as communications, electronics, aerospace, and national defense due to their exceptional frequency stability, high-quality factor, and excellent temperature stability. To meet the demand for growing development, higher resonators are needed. This letter utilizes a compound optimization algorithm to design a super high frequency quartz resonator with a center frequency of 4.15GHz and successfully fabricates the device using electron beam lithography. Scanning electron microscopy (SEM) characterization results show that the device remains relatively flat and smooth despite partial loss defects. The minimum finger width of the device is about 207 nm. Measured S-parameter results showed that the Q of this super high-frequency resonator can reach 842.7. The successful super high frequency resonator lays a foundation for its application in the high-frequency field and also provides a reference for future research and development of super high frequency quartz resonators.