Optical MEMS Accelerometer Based on Photonic Crystal with Air Defect Layer

The accelerometer based on photonic crystals has been widely used in various fields in recent years owing to its characteristics of high sensitivity. A one-dimensional optical microelectromechanical systems (MEMS) accelerometer based on photonic crystal with air defect layer is proposed. The optical sensing system of this accelerometer consists of an asymmetric one-dimensional photonic crystal with an air defect layer. The optical sensing system is designed as an asymmetric structure. Linear tuning can be achieved over a large wavelength range within a limited range of defect layer thickness variations. Compared with existing research results, the accelerometer has higher sensitivity, linearity, and reliability. After calculation by finite element method, the functional characteristics of the accelerometer are as follows: an optical sensitivity of 10.6 nm/g, a mechanical sensitivity of 9.61 nm/g, and a linear measurement range of ±25 g. This accelerometer has high resonant frequency and bandwidth. The optimization scheme of the accelerometer provides guidance for the design of a new MEMS accelerometer, which can be applied to fields such as inertial navigation.