Active Compensation Contour Control of Linear Motor XY Table Based on Equivalent Error Model

Cross-coupled control (CCC) is the main method for contour control of dual linear motor system, However, when the linear motor is disturbed by friction resistance, load changes and other disturbances, CCC will transfer the disturbance between two axes. In Order to reduce the contour accuracy of the high response system, an equivalent error model which is easy to calculate is established, which combined with the active compensation cross-coupling control structure. Firstly, the paper analyzes the source of single-axis dynamic error, and established the equivalent error model, and based on the equivalent error model, the variable gain equivalent error compensator is designed. Finally, the paper analyzes the influence of active compensation structure on contour error and input command, and the simulation results show that the equivalent contour error is about 10 µm.