Design of High-Performance MEMS Gyroscope Sensitive Structure and Closed-Loop Drive Control System

To enhance the overload resistance and robustness of the gyroscope, we proposed a novel gyroscope structure that incorporates a four-mass rotational framework along the X-axis. We optimized the dynamic parameters and simulated the displacement and stress of the gyroscope under high-impact conditions to verify its impact robustness. To further improve detection sensitivity, we designed a closed-loop drive control system. This system integrates a digital phase-locked loop for precise tracking of the drive's resonance frequency and phase, along with a digital automatic gain control module to ensure stable regulation of the drive amplitude. Simulation verification was conducted using MATLAB.