Novel Ultra-Wideband Characterization Method for Ferroelectric's Non-Linearity

In this study, we conducted a comprehensive characterization of ferroelectric, HfZrO, ranging from 500 Hz to 20 GHz. To analyze the Butterfly-Shaped C-V characteristics of ferroelectrics in the microwave band, we proposed a methodology to extract the permittivity of ferroelectrics by removing parasitic components within the Circular-Patch Metal-Ferroelectric-Metal (MFM) structure. Additionally, we confirmed that these parasitic elements can be disregarded at frequencies below approximately 0.1 GHz. Finally, through the analysis of ultra-wideband characteristics, we confirmed that the permittivity of ferroelectrics decreases with increasing frequency regardless of the applied DC voltage. This observation is consistent with the dispersion characteristics of insulators due to dipolar polarization in the microwave band.