Study of the Rotational Axis Stability of Micro-positioning Elastic Module with “Butterfly” Flexures

Rotation positioning systems are widely used in different orientation positioning or metrology systems. Analysis of their performance is an essential part of the development and verification of the metrology requirements. As a second stage of the performance analysis of the developed elastic micro-positioning module with “butterfly” flexures after the simulation study is the experimental study. Such a case study is representing the behavior of the elastic module in the application. One of the main accuracy characteristics is the deviation of the axis of rotation as it has major impact of the metrology performance of angular positioning modules. This paper presents the results of the study of the axis stability of micro-positioning elastic module.