A Micromechanical Frequency Comb-Based Binary Phase Shift Keying Demodulator

This work introduces a MEMS-based binary phase shift keying (BPSK) demodulator that leverages micromechanical frequency combs generated by an internal-resonating MEMS resonator. Utilizing a dual-input setup, the phase shift between the primary and secondary signals modulates the resultant force applied on the resonator, leading to changes in comb spacing. Particularly, the encoded 0° and 180° phase keys on the secondary signal cause the frequency combs to switch discretely between wider and narrower spacings, thereby reproducing the original binary data. Experimental results validate the effectiveness of this approach, showing clear differentiation between bit values through observable shifts in comb spacing. Furthermore, MEMS-based BPSK demodulator would achieve significantly reduced power consumption compared to traditional transistor-based systems, marking a pioneering step towards ultra-low-power and all-mechanical RF front-ends that potentially revolutionize energy-efficient communication for battery-constrained applications.