Development of An Easily Fabricated, Highly Flexible PMUT Array Based on Titanium Foil for Enhancing Ultrasound Manipulation

This study presents the development of a highly flexible piezoelectric micromachined ultrasonic transducer (PMUT) array, fabricated on titanium foil. The 3x3 array configuration is designed to enhance ultrasound manipulation through constructive interference, offering superior flexibility compared to conventional silicon-based PMUTs. The novel fabrication process includes micromachining, annealing, and deposition of a PZT layer, resulting in a lightweight and bendable array. Experimental results demonstrate that the PMUT array achieves a significant improvement in acoustic pressure, particularly when mounted on curved surfaces, highlighting its potential for applications in versatile ultrasonic devices.