Modeling and Simulation of a Piezoelectric-Capacitive Hybrid Micromachined Ultrasonic Transducer

This paper proposes a piezoelectric-capacitive hybrid micromachined ultrasonic transducer (HMUT). The operation mode of HMUT integrates piezoelectric torque and electrostatic forces on the vibration membrane. Modeling through finite element method, the coupling of piezoelectric effects, electromechanical forces, and acoustic-structure interactions are investigated. The results indicate that HMUT surpasses PMUT and CMUT in both transmission and reception sensitivity. Notably, the PZT-HMUT exhibits transmission sensitivity more than nine times higher than that of PMUT/CMUT, and its round-trip sensitivity exceeds six times that of PMUT/CMUT.