Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor

This paper presents a facile fabrication approach for micro-electro-mechanical systems (MEMS) thermal sensors, utilizing laser ablation and origami techniques to create a 3D free-standing structure. A single-step fabrication for a micromachined metal structure was demonstrated using a fiber laser. Thin nichrome sensing structures as small as 45.1 ¼m width were fabricated, with an electrical resistance of up to 6 Ω and a TCR of 390.39 ppm/°C. Thermal analysis via infrared thermography revealed that the free-standing structure exhibits a diminished thermal mass. The voltage response for airflow demonstrates the sensing ability of the fabricated structure, showcasing its potential for airflow sensing applications.