An Ultra-high Bandwidth Piezoelectric MEMS Accelerometer Towards Condition-based Monitoring

MEMS accelerometers often encounters a trade-off between sensitivity and bandwidth. To overcome this limitation and achieve a high bandwidth without compromising sensitivity, we have transitioned the spring-mass design from conventional bending paradigm to tensile-compressive paradigm, resulting in a significant increase in the spring stiffness. This paper introduces a piezoelectric MEMS accelerometer with an unprecedented bandwidth exceeding 100 kHz. The device exhibits a resonant frequency of 165 kHz and a sensitivity of 0.2 mV/g. To the best of our knowledge, this is the highest bandwidth reported for a piezoelectric MEMS accelerometer, demonstrating its exceptional potential for condition-based monitoring (CbM) applications.