Ultra-High Quality Factor NOMS Device Incorporating Photonic Crystal Cavity for Femto-Gram Sensing

A label-free platform based on integration of cantilever and photonic crystal cavity resonator is reported with both high sensitivity and ultra-high quality factor for femto-gram detection of chemicals. The proposed chemical sensor shows sharp resonant frequency with quality factor of 12800, displacement and wavelength shift is obtained as 29.9425 μm and 7.15625 nm with chemical weight of 100 fg. The proposed sensor shows a high confinement factor of 62%, with an average sensitivity of 1.62 nm/fg manifested its promising applications for detection of various virus present in chemicals. The device shows capability to work in various fluids for chemical sensing purposes.